Backplane TFT

ADRC Technology Introduction for ADRC process

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Blue Laser Annealing system
BLA(Blue Laser Annealing) line beam
ㆍCompany : AP system
ㆍMaximum Scan Size : 6 inch wafer
ㆍLaser power : 11.44 W (Maximum)
ㆍWavelength : 445nm
ㆍLaser diodes : 3 W (20 pieces)
ㆍBeam size (LA x SA) : 520 um x 20 um
ㆍScan Speed : ~400 mm/s
ㆍCW(Continuous-Wave) Laser
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Annealing System
Vacuum Oven
Company : 제이오택
Model. No. : OV-11

Furnace
Company : N/A
Model.No : N/A

Vacuum oven : ≤ 300℃
Furnace : Air, N2 annealing ≤ 800℃
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