Backplane TFT

ADRC Technology Introduction for ADRC process

Advanced Display Research Center (ADRC) is leading the

world in field of display research.

  A total of 40 processes are registered.
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Photo-lithography
Size
1. Mask : 8-inch
2. Substrate : < 15cm X 15cm)
3. Procedure : PR coating → Photo-lithography → Develop → Etch → Strip
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Baking System
Soft and Hard bakes for Photo-resist or solution process

Oven type

Company : Clean Oven
Model. No. : OF-11s

Soft baker : 110℃
Hard baker : 130℃
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Spin-coating and Drying System
[Spin-coater]
Company : 대신 Tech
Model : No : WS-400B-8NPP/LITE

[Spin-dryer]
Company : ㈜랍도스
Model. No. : VSF-200MD-E

Spin-speed : Max 4,000 rpm
Size : 5cm x 5cm 이상, 15cm x 15cm 이하
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